Agenda

Many thanks for your interest in MEMS Manufacturing 2022! It was a fantastic online conference with 190+ participants and we look forward to seeing you at our upcoming online events.

You can still register to access the recorded presentations and slides in electronic format from MEMS Manufacturing 2022. click here to register and then you’ll receive a link to download the conference materials. For more information or if you have any questions, please contact Jessica Ingram at jessica@microtechventures.com.

MEMS Manufacturing 2022
4th Annual Conference and Exhibition
March 1-3, 2022
ONLINE

Tuesday, March 1

US Eastern Time (ET)

Welcome, Opening Remarks, and Icebreaker Session
Mike Pinelis, PhD
President and CEO
Microtech Ventures
10:00 AM – 10:45 AM
Trends in MEMS Manufacturing and Evolution of MEMS Foundries Capabilities
Dimitrios Damianos, PhD
Sr. Analyst, Imaging and MEMS
Yole Developpement
10:45 AM – 11:30 AM
Integrated Functional Devices on Complex Surfaces with Direct Write Atomic Layer Deposition Technology
Maksym Plakhotnyuk, PhD
CEO
Atlant 3D Nanosystems -- Gold Sponsor
11:30 AM – 11:45 AM
Lithography for MEMS Applications: Emerging Process Trends and Developments
Keith Cooper
Technical Sales Engineer
Neutronix -- Silver Sponsor
11:45 AM – 11:55 AM
Networking Lunch 11:55 AM – 01:00 PM
MEMS Fabrication Platform for Navigation-Grade Gyroscopes
Philippe Robert, PhD
Business Development Manager and Sr. Expert for MEMS
CEA Leti
01:00 PM – 01:20 PM
Manufacturing Paradigm Shift and 3D Printing in Journey to Trillion Sensor Nodes
Janusz Bryzek, PhD
Executive Chairman, Chief Visionary Officer
Exo Imaging
01:20 PM – 02:10 PM
Quality Planning and Assurance in MEMS Manufacturing
Jayson Loewen
Senior NPI Manager
Teledyne -- Silver Sponsor
02:10 PM – 02:25 PM
Networking Break 02:25 PM – 03:10 PM
A Reality Check for Medical MEMS Manufacturing
Ariel Cao
CEO
InjectSense
03:10 PM – 03:30 PM
Enabling Miniaturization with Micro 3D Printing
John Kawola
CEO
Boston Micro Fabrication -- Gold Sponsor
03:30 PM – 03:40 PM
Advanced Silicon Wafers with Built-in Patterns Adding Value in MEMS Volume Production
Jani Karttunen
Product Manager for Patterned Products
Okmetic -- Silver Sponsor
03:40 PM – 03:50 PM
CMUT Fabrication Platform: Combining Performance and Volume Manufacturing
Paul Bekkers
Business Development Manager
Philips MEMS Foundry -- Silver Sponsor
03:50 PM – 03:55 PM
MEMS Fabrication and Supply Chain in Asia
Doug Sparks, PhD
CTO
Hanking Electronics
03:545 PM – 04:35 PM
Closing Remarks and Networking Session
Mike Pinelis, PhD
President and CEO
Microtech Ventures
04:35 PM – 04:45 PM

Wednesday, March 2

US Eastern Time (ET)

Welcome and Opening Remarks
Mike Pinelis, PhD
President and CEO
Microtech Ventures
10:00 AM – 10:15 AM
Panel Discussion -- MEMS Manufacturing Supply Chain

Doug Sparks, PhD
CTO
Hanking Electronics


Tony Flannery, PhD
Sr. Director, Nanofabrication Development
Illumina


Aric Shorey, PhD
Director of Glass Technology
Menlo Micro


Paul Pickering
Managing Director
Microtech Ventures


Arjun Kumar Kantimahanti
Sr. Vice President of Technology Development
SilTerra

10:15 AM – 11:45 AM
Networking Lunch 11:45 AM – 12:45 PM
Next-Generation Fabrication Processes for MEMS and Sensors
Steve Kosier, PhD
CTO
Skywater Technology Foundry
12:45 PM – 01:05 PM
Manufacturing Process Challenges for MEMS Based Holography SLM Devices
Christoph Hohle, PhD
Manager Technology Development Spatial Light Modulators
Fraunhofer IPMS -- R&D Partner
01:05 PM – 01:35 PM
Fabrication Process Technologies and Requirements for Deep Silicon Micro-Speakers
Holger Conrad
Head of MEMS Production and Development
Arioso Systems
01:35 PM – 01:55 PM
Fabrication of MEMS Based Sensors and Actuators: From Silicon Wafers to Glass Panel Integration
Xavier Rottenberg, PhD
Fellow
Imec -- Silver Sponsor
01:55 PM – 02:15 PM
High Throughput Ashing for MEMS Manufacturing
Yin Xu
R&D and Product Manager
ULVAC -- Bronze Sponsor
02:15 PM – 02:25 PM
Networking Break 02:25 PM – 03:15 PM
MEMS Planarization CMP Processes: Emerging Techniques and Applications
Norio Kamitsubo
General Manager
D-Process
03:15 PM – 03:35 PM
Simple, Cost-Effective Techniques for Rapid Prototyping 3D Printed Microfluidics and Microdevices
Brian O'Grady
Postdoctoral Researcher
Vanderbilt University
03:35 PM – 03:55 PM
Nanoimprint Lithography: Emerging Techniques and Applications
Jayant Patil
Business Development Manager
Kyodo International -- Bronze Sponsor
03:55 PM – 04:05 PM
Through Glass Vias in MEMS Processing
Aric Shorey, PhD
Director of Glass Technology
Menlo Micro
04:05 PM – 04:35 PM
Closing Remarks and Networking Session
Mike Pinelis, PhD
President and CEO
Microtech Ventures
04:35 PM – 04:45 PM

Thursday, March 3

US Eastern Time (ET)

Welcome and Opening Remarks
Mike Pinelis, PhD
President and CEO
Microtech Ventures
10:00 AM – 10:15 AM
MEMS Manufacturing Processes: Trends, Innovations, and Emerging Techniques
Romain Fraux
CEO
System Plus Consulting
10:15 AM – 10:55 AM
Monolithic CMOS MEMS Fabrication: Techniques, Challenges, and Applications
Arjun Kumar Kantimahanti
Sr. Vice President of Technology Development
SilTerra -- Gold Sponsor
10:55 AM – 11:05 AM
MPD: A Novel Wafer-Scale Nanoparticle Deposition Process for 3D Microstructures
Thomas Russell
CEO
Mesoline
11:05 AM – 11:25 AM
Managing a High-Mix and Low-Volume MEMS R&D Fab by Applying KPIs
Thomas Zarbock
Division Director for MEMS Engineering, Manufacturing and Test
Fraunhofer IPMS -- R&D Partner
11:25 AM – 11:55 AM
Networking Lunch 11:55 AM – 01:00 PM
Thin Film PiezoMEMS Fabrication: Emerging Materials, Processes, and Techniques
Gwenael Le Rhun, PhD
Project Manager and Sr. Expert on Piezoelectric Material Integration
CEA Leti
01:00 PM – 01:20 PM
Advanced Packaging for MEMS Based Sensors and Actuators Using Thin Glass
Ulrich Peuchert, PhD
Global Business Development and Product Manager
SCHOTT
01:20 PM – 01:40 PM
Getter Films Integration in High-Volume MEMS Fabrication Processes
Marco Moraja, PhD
Business Manager for Getters and Dispensers
SAES Group -- Silver Sponsor
01:40 PM – 01:45 PM
Wafer Level Monolithic Fabrication of Micro-Optics
Davide Lomellini
Area Sales Manager
SUSS MicroOptics -- Bronze Sponsor
01:45 PM – 01:55 PM
Making MEMS Design Easy: From Simulation to Product
Philipp Mehner
Product Manager
i-ROM -- Bronze Sponsor
01:55 PM – 02:10 PM
Networking Break 02:10 PM – 02:50 PM
Reaching Silicon-based NEMS Performances with 3D Printing Technology
Stefano Stassi, PhD
Assistant Professor
Politecnico di Torino
02:50 PM – 03:15 PM
Pathway for Reliable Metallized Through-Glass Vias
Chukwudi Okoro, PhD
Sr. Research Scientist
Corning
03:15 PM – 03:40 PM
Piezoelectric Thin Films Processes for MEMS Fabrication
Hiroshi Miyajima, PhD
General Manager, MEMS Solutions
Sumitomo Precision Products
03:40 PM – 04:00 PM
Piezoelectric Materials for Fabricating Laser Beam Scanning MEMS Devices with Performance Scalability
Andrea Onetti
Analog and MEMS Group Vice President
STMicroelectronics
04:00 PM – 04:30 PM
Closing Remarks and Networking Session
Mike Pinelis, PhD
President and CEO
Microtech Ventures
04:30 PM – 04:40 PM

Agenda and panels are subject to change.